2011年9月1日【精密工学会】微細金型の精密研磨に関する研究:変位拡大機構型圧電アクチュエータを利用した2軸振動研磨装置の開発

2011/09/01

詳細情報

論文名微細金型の精密研磨に関する研究:変位拡大機構型圧電アクチュエータを利用した2軸振動研磨装置の開発
著者*徐 世傑, 鈴木 浩文, 岡田 睦, 吉田 和史, 林 偉民, 矢野 健, 樋口 俊郎
キーワード圧電素子, メカニカルトランスフォーマ, 精密研磨, 微細構造金型, 変位拡大率, 弾性ヒンジ
掲載先精密工学会
公開日2011年9月1日
抄録Demands of precision molds with complicated microstructures for digital devices, μ-TAS and etc. are increasing [1]. The structured molds must be polished after grinding or cutting in order to improve the surface roughness. In this report, a two dimensional low frequency vibration (2DLFV) polishing actuator using PZT is proposed and developed. The 2DLFV consists of 4 MechaTrans, a multiplayer stacked piezoelectric actuator (PZT) incorporated with mechanical transformer, and a center piece. Mechanical transformer is a kind of flexure hinges structured that magnifies the stroke of the multiplayer stacked piezoelectric actuator around 7 times to 120 μm. With this actuation, the tool vibrates in a circle trajectory to achieve polishing effect [2]. In the polishing experiments, tungsten carbide molds (work pieces) are polished with diamond slurry. The surface roughness of the work pieces and polishing efficiency are evaluated. From the experimental results, we found low frequency vibration especially 2DLFV is a useful micro polishing system for micro structured mold.
掲載先URLhttps://www.jstage.jst.go.jp/article/pscjspe/2011S/0/2011S_0_865/_article/-char/ja/

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